Coherent EUV light source for compact lens-less microscopy and precision metrology
Period
01.01.2025 - 31.12.2027
Members of research team
Project Administrator
Principal Investigator
Head of the Research Team
Methods and Applications of Mathematical Physics
Period
01.01.2016 - 31.12.2018
External code
SGS16/239/OHK4/3T/14
Members of research team
Principal Investigator